20th
International CODATA Conference (Times New Roman, 11pt)
Session: Computational informatics: integrating data science with materials
modeling
Semiconductor silicon for
microelectronics, power electronics and photovoltaics. Russian Scenario
F.A. Kuznetsov
Institute of
inorganic chemistry, Siberian branch of
Semiconductor
silicon is a good example of high tech material, which requires continuous
attention of researchers. Silicon is
among possibly most studied of all know materials. However, is clear that
potential combinations of properties of this material are far from being
exhausted. Permanent perfection of this material is reflected in progress of
solid state electronics, where silicon is and for a
long time will be main material.
Most
sophisticate part of technology of semiconductor silicon is technology of
polycrystalline silicon. Till now most widely used process for producing of the
poly silicon was so called Siemens process. Actually each producer is using his
own variety of this “chlorine” process. Differences are connected with
technology routes of different components of the process, regimes of various
stages of the process, ways of using byproducts and so on. Essential in
selection of technology version is planned application of the silicon.
Requirements for different uses differ significantly.
. The paper
includes description of developed methods of thermodynamic analysis and its
application for optimization of processes of poly silicon production by a
variety of Siemens process. Information of practical use of results of the
thermodynamic analysis by our industrial partners will be also given.
In conclusion
other methods of poly silicon production will be considered.